Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11441222 | PECVD deposition system for deposition on selective side of the substrate | Fayaz Shaikh, Curtis Bailey | 2022-09-13 |
| 11408734 | Distance measurement between gas distribution device and substrate support at high temperatures | Mark E. Emerson | 2022-08-09 |