Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11512393 | Dynamic sheath control with edge ring lift | Richard M. Blank, Curtis Bailey, Michael J. Janicki | 2022-11-29 |
| 11239100 | Auto-calibration to a station of a process module that spins a wafer | Richard M. Blank, Peter Thaulad, Paul Konkola | 2022-02-01 |