Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11404302 | Substrate susceptor using edge purging | Raj Singu, Todd Robert Dunn, Carl Louis White, Herbert Terhorst, Eric James Shero | 2022-08-02 |
| 11295980 | Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures | Kiran Shrestha, Shankar Swaminathan, Chiyu Zhu, Henri Jussila, Qi Xie | 2022-04-05 |
| 11286558 | Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film | Eric Christopher Stevens, Shankar Swaminathan, Charles Dezelah, Qi Xie, Giuseppe Alessio Verni | 2022-03-29 |