Issued Patents 2022
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11447854 | Process for film deposition on a substrate with non-uniform overlapping subpulses of a precursor | — | 2022-09-20 |
| 11393690 | Deposition method | Henri Jussila, Qi Xie | 2022-07-19 |
| 11295980 | Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures | Bhushan Zope, Kiran Shrestha, Shankar Swaminathan, Henri Jussila, Qi Xie | 2022-04-05 |
| 11230769 | Thermal atomic layer etching processes | Tom E. Blomberg, Varun Sharma, Suvi Haukka, Marko Tuominen | 2022-01-25 |
| 11230770 | Thermal atomic layer etching processes | Tom E. Blomberg, Varun Sharma, Suvi Haukka, Marko Tuominen | 2022-01-25 |
| 11233133 | NbMC layers | Timo Asikainen, Robert Brennan Milligan | 2022-01-25 |