Issued Patents 2022
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11525184 | Dual selective deposition | Raija H. Matero, Eva Tois, Antti Niskanen, Marko Tuominen, Hannu Huotari +1 more | 2022-12-13 |
| 11501965 | Plasma enhanced deposition processes for controlled formation of metal oxide thin films | Lingyun Jia, Viljami Pore, Marko Tuominen, Sun Ja Kim, Oreste Madia +2 more | 2022-11-15 |
| 11430656 | Deposition of oxide thin films | Elina Färm, Raija H. Matero, Eva Tois, Hidemi Suemori, Antti Niskanen +2 more | 2022-08-30 |
| 11421321 | Apparatuses for thin film deposition | Jun Kawahara, Antti Niskanen, Eva Tois, Raija H. Matero, Hidemi Suemori +2 more | 2022-08-23 |
| 11387107 | Deposition of organic films | Eva Tois, Hidemi Suemori, Viljami Pore, Varun Sharma | 2022-07-12 |
| 11387106 | Method for depositing a ruthenium-containing film on a substrate by a cyclical deposition process | — | 2022-07-12 |
| 11302527 | Methods for forming doped silicon oxide thin films | Noboru Takamure, Atsuki Fukazawa, Hideaki Fukuda, Antti Niskanen, Ryu Nakano +1 more | 2022-04-12 |
| 11230770 | Thermal atomic layer etching processes | Tom E. Blomberg, Varun Sharma, Marko Tuominen, Chiyu Zhu | 2022-01-25 |
| 11230769 | Thermal atomic layer etching processes | Tom E. Blomberg, Varun Sharma, Marko Tuominen, Chiyu Zhu | 2022-01-25 |
| 11213853 | Selective deposition of metals, metal oxides, and dielectrics | Raija H. Matero, Eva Tois, Antti Niskanen, Marko Tuominen, Hannu Huotari +2 more | 2022-01-04 |