Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11525184 | Dual selective deposition | Suvi Haukka, Eva Tois, Antti Niskanen, Marko Tuominen, Hannu Huotari +1 more | 2022-12-13 |
| 11430656 | Deposition of oxide thin films | Suvi Haukka, Elina Färm, Eva Tois, Hidemi Suemori, Antti Niskanen +2 more | 2022-08-30 |
| 11421321 | Apparatuses for thin film deposition | Jun Kawahara, Suvi Haukka, Antti Niskanen, Eva Tois, Hidemi Suemori +2 more | 2022-08-23 |
| 11213853 | Selective deposition of metals, metal oxides, and dielectrics | Suvi Haukka, Eva Tois, Antti Niskanen, Marko Tuominen, Hannu Huotari +2 more | 2022-01-04 |