Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11527400 | Method for depositing silicon oxide film having improved quality by peald using bis(diethylamino)silane | Yuko Kengoyama, Ryu Nakano | 2022-12-13 |
| 11430656 | Deposition of oxide thin films | Suvi Haukka, Elina Färm, Raija H. Matero, Eva Tois, Antti Niskanen +2 more | 2022-08-30 |
| 11421321 | Apparatuses for thin film deposition | Jun Kawahara, Suvi Haukka, Antti Niskanen, Eva Tois, Raija H. Matero +2 more | 2022-08-23 |
| 11387107 | Deposition of organic films | Eva Tois, Viljami Pore, Suvi Haukka, Varun Sharma | 2022-07-12 |