Issued Patents 2022
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11525184 | Dual selective deposition | Suvi Haukka, Raija H. Matero, Eva Tois, Marko Tuominen, Hannu Huotari +1 more | 2022-12-13 |
| 11430656 | Deposition of oxide thin films | Suvi Haukka, Elina Färm, Raija H. Matero, Eva Tois, Hidemi Suemori +2 more | 2022-08-30 |
| 11421321 | Apparatuses for thin film deposition | Jun Kawahara, Suvi Haukka, Eva Tois, Raija H. Matero, Hidemi Suemori +2 more | 2022-08-23 |
| 11367613 | Deposition of SiN | Shang Chen, Viljami Pore, Ryoko Yamada | 2022-06-21 |
| 11302527 | Methods for forming doped silicon oxide thin films | Noboru Takamure, Atsuki Fukazawa, Hideaki Fukuda, Suvi Haukka, Ryu Nakano +1 more | 2022-04-12 |
| 11289327 | Si precursors for deposition of SiN at low temperatures | Shang Chen, Viljami Pore | 2022-03-29 |
| 11286562 | Gas-phase chemical reactor and method of using same | — | 2022-03-29 |
| 11213853 | Selective deposition of metals, metal oxides, and dielectrics | Suvi Haukka, Raija H. Matero, Eva Tois, Marko Tuominen, Hannu Huotari +2 more | 2022-01-04 |