Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11367613 | Deposition of SiN | Shang Chen, Viljami Pore, Antti Niskanen | 2022-06-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11367613 | Deposition of SiN | Shang Chen, Viljami Pore, Antti Niskanen | 2022-06-21 |