Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11367613 | Deposition of SiN | Viljami Pore, Ryoko Yamada, Antti Niskanen | 2022-06-21 |
| 11289327 | Si precursors for deposition of SiN at low temperatures | Antti Niskanen, Viljami Pore | 2022-03-29 |