Issued Patents 2022
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11525184 | Dual selective deposition | Suvi Haukka, Raija H. Matero, Eva Tois, Antti Niskanen, Marko Tuominen +1 more | 2022-12-13 |
| 11501966 | Selective layer formation using deposition and removing | Eva Tois | 2022-11-15 |
| 11501965 | Plasma enhanced deposition processes for controlled formation of metal oxide thin films | Lingyun Jia, Marko Tuominen, Sun Ja Kim, Oreste Madia, Eva Tois +2 more | 2022-11-15 |
| 11446699 | Vapor phase deposition of organic films | Marko Tuominen, Hannu Huotari | 2022-09-20 |
| 11389824 | Vapor phase deposition of organic films | Marko Tuominen, Hannu Huotari | 2022-07-19 |
| 11387107 | Deposition of organic films | Eva Tois, Hidemi Suemori, Suvi Haukka, Varun Sharma | 2022-07-12 |
| 11367613 | Deposition of SiN | Shang Chen, Ryoko Yamada, Antti Niskanen | 2022-06-21 |
| 11342216 | Cyclical deposition method and apparatus for filling a recess formed within a substrate surface | Zecheng Liu | 2022-05-24 |
| 11289327 | Si precursors for deposition of SiN at low temperatures | Antti Niskanen, Shang Chen | 2022-03-29 |
| 11227789 | Method and apparatus for filling a recess formed within a substrate surface | Zecheng Liu | 2022-01-18 |
| 11213853 | Selective deposition of metals, metal oxides, and dielectrics | Suvi Haukka, Raija H. Matero, Eva Tois, Antti Niskanen, Marko Tuominen +2 more | 2022-01-04 |