Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11342216 | Cyclical deposition method and apparatus for filling a recess formed within a substrate surface | Viljami Pore | 2022-05-24 |
| 11227789 | Method and apparatus for filling a recess formed within a substrate surface | Viljami Pore | 2022-01-18 |