Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11501965 | Plasma enhanced deposition processes for controlled formation of metal oxide thin films | Lingyun Jia, Viljami Pore, Marko Tuominen, Sun Ja Kim, Eva Tois +2 more | 2022-11-15 |