Issued Patents 2022
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11525184 | Dual selective deposition | Suvi Haukka, Raija H. Matero, Eva Tois, Antti Niskanen, Hannu Huotari +1 more | 2022-12-13 |
| 11501965 | Plasma enhanced deposition processes for controlled formation of metal oxide thin films | Lingyun Jia, Viljami Pore, Sun Ja Kim, Oreste Madia, Eva Tois +2 more | 2022-11-15 |
| 11446699 | Vapor phase deposition of organic films | Viljami Pore, Hannu Huotari | 2022-09-20 |
| 11389824 | Vapor phase deposition of organic films | Viljami Pore, Hannu Huotari | 2022-07-19 |
| 11230770 | Thermal atomic layer etching processes | Tom E. Blomberg, Varun Sharma, Suvi Haukka, Chiyu Zhu | 2022-01-25 |
| 11230769 | Thermal atomic layer etching processes | Tom E. Blomberg, Varun Sharma, Suvi Haukka, Chiyu Zhu | 2022-01-25 |
| 11213853 | Selective deposition of metals, metal oxides, and dielectrics | Suvi Haukka, Raija H. Matero, Eva Tois, Antti Niskanen, Hannu Huotari +2 more | 2022-01-04 |