Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11421321 | Apparatuses for thin film deposition | Suvi Haukka, Antti Niskanen, Eva Tois, Raija H. Matero, Hidemi Suemori +2 more | 2022-08-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11421321 | Apparatuses for thin film deposition | Suvi Haukka, Antti Niskanen, Eva Tois, Raija H. Matero, Hidemi Suemori +2 more | 2022-08-23 |