Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11527400 | Method for depositing silicon oxide film having improved quality by peald using bis(diethylamino)silane | Yuko Kengoyama, Hidemi Suemori | 2022-12-13 |
| 11482418 | Substrate processing method and apparatus | Akinori Nakano, Toshihisa Nozawa | 2022-10-25 |
| 11302527 | Methods for forming doped silicon oxide thin films | Noboru Takamure, Atsuki Fukazawa, Hideaki Fukuda, Antti Niskanen, Suvi Haukka +1 more | 2022-04-12 |