Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11527400 | Method for depositing silicon oxide film having improved quality by peald using bis(diethylamino)silane | Hidemi Suemori, Ryu Nakano | 2022-12-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11527400 | Method for depositing silicon oxide film having improved quality by peald using bis(diethylamino)silane | Hidemi Suemori, Ryu Nakano | 2022-12-13 |