Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11482418 | Substrate processing method and apparatus | Akinori Nakano, Ryu Nakano | 2022-10-25 |
| 11476109 | Method of forming an electronic structure using reforming gas, system for performing the method, and structure formed using the method | Shinya Yoshimoto, Jun Yoshikawa | 2022-10-18 |