Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11306395 | Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatus | Eric James Shero, William George Petro, Eric Wang, Fred Alokozai, Dong Li +3 more | 2022-04-19 |
| 11233133 | NbMC layers | Chiyu Zhu, Timo Asikainen | 2022-01-25 |