Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11380557 | Apparatus and method for gas delivery in semiconductor process chambers | Vincent Kirchhoff, Felix Rabinovich, Gary Urban Keppers | 2022-07-05 |
| RE48994 | Apparatus and method for providing uniform flow of gas | Joseph Yudovsky, Mei Chang, Paul F. Ma, David Chu, Chien-Teh Kao +2 more | 2022-03-29 |