Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11380557 | Apparatus and method for gas delivery in semiconductor process chambers | Faruk Gungor, Felix Rabinovich, Gary Urban Keppers | 2022-07-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11380557 | Apparatus and method for gas delivery in semiconductor process chambers | Faruk Gungor, Felix Rabinovich, Gary Urban Keppers | 2022-07-05 |