Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11530480 | Injector for batch processing and methods of use | Kevin Griffin, Mandyam Sriram | 2022-12-20 |
| 11430680 | Position and temperature monitoring of ALD platen susceptor | Abraham Ravid, Kevin Griffin, Kaushal Gangakhedkar, Dmitry A. Dzilno, Alex Minkovich | 2022-08-30 |
| RE48994 | Apparatus and method for providing uniform flow of gas | Mei Chang, Faruk Gungor, Paul F. Ma, David Chu, Chien-Teh Kao +2 more | 2022-03-29 |
| 11261525 | Injector for batch processing and methods of use | Kevin Griffin, Mandyam Sriram | 2022-03-01 |
| 11222809 | Patterned vacuum chuck for double-sided processing | Visweswaren Sivaramakrishnan, Ludovic Godet, Rutger Meyer Timmerman Thijssen | 2022-01-11 |