Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11335591 | Thermal process chamber lid with backside pumping | Dien-Yeh Wu, Wei V. Tang, Yixiong Yang, Bo Wang | 2022-05-17 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11335591 | Thermal process chamber lid with backside pumping | Dien-Yeh Wu, Wei V. Tang, Yixiong Yang, Bo Wang | 2022-05-17 |