Issued Patents 2022
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11495456 | Ozone for selective hydrophilic surface treatment | Ting Xie, Xinliang Lu, Michael X. Yang | 2022-11-08 |
| 11495437 | Surface pretreatment process to improve quality of oxide films produced by remote plasma | Ting Xie, Xinliang Lu, Michael X. Yang | 2022-11-08 |
| 11462413 | Processing of workpieces using deposition process and etch process | Shanyu Wang, Chun Yan, Michael X. Yang, Tsai Wen Sung, Qi Zhang | 2022-10-04 |
| 11387115 | Silicon mandrel etch after native oxide punch-through | Chun Yan, Tsai Wen Sung, Sio On Lo, Michael X. Yang | 2022-07-12 |
| 11384429 | Selective cobalt deposition on copper surfaces | Sang Ho Yu, Kevin Moraes, Seshadri Ganguli, See-Eng Phan | 2022-07-12 |
| 11387111 | Processing of workpieces with reactive species generated using alkyl halide | Michael X. Yang, Xinliang Lu | 2022-07-12 |
| 11315801 | Processing of workpieces using ozone gas and hydrogen radicals | Qi Zhang, Haichun Yang, Michael X. Yang | 2022-04-26 |
| 11251050 | Silicon oxide selective dry etch process | Qi Zhang, Xinliang Lu, Haichun Yang | 2022-02-15 |