Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11315801 | Processing of workpieces using ozone gas and hydrogen radicals | Qi Zhang, Hua Chung, Michael X. Yang | 2022-04-26 |
| 11251050 | Silicon oxide selective dry etch process | Qi Zhang, Xinliang Lu, Hua Chung | 2022-02-15 |