| 11521868 |
Support plate for localized heating in thermal processing systems |
Rolf Bremensdorfer, Johannes Keppler, Thorsten Hülsmann |
2022-12-06 |
| 11521847 |
Hydrogen assisted atmospheric radical oxidation |
Christian Pfahler, Alexandr Cosceev |
2022-12-06 |
| 11495456 |
Ozone for selective hydrophilic surface treatment |
Ting Xie, Xinliang Lu, Hua Chung |
2022-11-08 |
| 11495437 |
Surface pretreatment process to improve quality of oxide films produced by remote plasma |
Ting Xie, Xinliang Lu, Hua Chung |
2022-11-08 |
| 11482434 |
Systems and methods for workpiece processing |
— |
2022-10-25 |
| 11462413 |
Processing of workpieces using deposition process and etch process |
Shanyu Wang, Chun Yan, Hua Chung, Tsai Wen Sung, Qi Zhang |
2022-10-04 |
| 11387115 |
Silicon mandrel etch after native oxide punch-through |
Chun Yan, Tsai Wen Sung, Sio On Lo, Hua Chung |
2022-07-12 |
| 11387111 |
Processing of workpieces with reactive species generated using alkyl halide |
Hua Chung, Xinliang Lu |
2022-07-12 |
| 11315801 |
Processing of workpieces using ozone gas and hydrogen radicals |
Qi Zhang, Haichun Yang, Hua Chung |
2022-04-26 |
| 11289323 |
Processing of semiconductors using vaporized solvents |
Shuang Meng, Shawming Ma |
2022-03-29 |
| 11276560 |
Spacer etching process |
Tsai Wen Sung, Chun Yan |
2022-03-15 |
| 11257696 |
Systems and methods for workpiece processing |
Ryan Pakulski |
2022-02-22 |