Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11508560 | Focus ring adjustment assembly of a system for processing workpieces under vacuum | Martin L. Zucker, Peter J. Lembesis, Ryan Pakulski | 2022-11-22 |
| 11348767 | Plasma processing apparatus having a focus ring adjustment assembly | Martin L. Zucker, Peter J. Lembesis, Ryan Pakulski | 2022-05-31 |
| 11348784 | Enhanced ignition in inductively coupled plasmas for workpiece processing | Stephen E. Savas | 2022-05-31 |
| 11289323 | Processing of semiconductors using vaporized solvents | Shuang Meng, Michael X. Yang | 2022-03-29 |
| 11264249 | Carbon containing hardmask removal process using sulfur containing process gas | Fen Dai, Tinghao Wang, Oliver Jan, Moo-Hyun Kim, Zhongming Liu | 2022-03-01 |