Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11335563 | Pitch reduction technology using alternating spacer depositions during the formation of a semiconductor device and systems including same | Baosuo Zhou, Mirzafer Abatchev, Ardavan Niroomand, Paul A. Morgan, Joseph Neil Greeley +1 more | 2022-05-17 |
| 11289323 | Processing of semiconductors using vaporized solvents | Shawming Ma, Michael X. Yang | 2022-03-29 |