Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11264249 | Carbon containing hardmask removal process using sulfur containing process gas | Fen Dai, Tinghao Wang, Moo-Hyun Kim, Shawming Ma, Zhongming Liu | 2022-03-01 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11264249 | Carbon containing hardmask removal process using sulfur containing process gas | Fen Dai, Tinghao Wang, Moo-Hyun Kim, Shawming Ma, Zhongming Liu | 2022-03-01 |