Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11492893 | Apparatus and method for predicting a deformed shape of a structure | Junho Choi | 2022-11-08 |
| 11264249 | Carbon containing hardmask removal process using sulfur containing process gas | Fen Dai, Tinghao Wang, Oliver Jan, Shawming Ma, Zhongming Liu | 2022-03-01 |