Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11515127 | End effectors for moving workpieces and replaceable parts within a system for processing workpieces under vacuum | Martin L. Zucker, Peter J. Lembesis | 2022-11-29 |
| 11508560 | Focus ring adjustment assembly of a system for processing workpieces under vacuum | Martin L. Zucker, Peter J. Lembesis, Shawming Ma | 2022-11-22 |
| 11348767 | Plasma processing apparatus having a focus ring adjustment assembly | Martin L. Zucker, Peter J. Lembesis, Shawming Ma | 2022-05-31 |
| 11257696 | Systems and methods for workpiece processing | Michael X. Yang | 2022-02-22 |