Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11515127 | End effectors for moving workpieces and replaceable parts within a system for processing workpieces under vacuum | Peter J. Lembesis, Ryan Pakulski | 2022-11-29 |
| 11508560 | Focus ring adjustment assembly of a system for processing workpieces under vacuum | Peter J. Lembesis, Ryan Pakulski, Shawming Ma | 2022-11-22 |
| 11348767 | Plasma processing apparatus having a focus ring adjustment assembly | Peter J. Lembesis, Ryan Pakulski, Shawming Ma | 2022-05-31 |
| 11251026 | Material deposition prevention on a workpiece in a process chamber | Jeffrey Cue | 2022-02-15 |