Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11521832 | Uniformity control for radio frequency plasma processing systems | Alexandre De Chambrier | 2022-12-06 |
| 11348784 | Enhanced ignition in inductively coupled plasmas for workpiece processing | Shawming Ma | 2022-05-31 |
| 11251075 | Systems and methods for workpiece processing using neutral atom beams | — | 2022-02-15 |