Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11521832 | Uniformity control for radio frequency plasma processing systems | Stephen E. Savas | 2022-12-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11521832 | Uniformity control for radio frequency plasma processing systems | Stephen E. Savas | 2022-12-06 |