Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11521847 | Hydrogen assisted atmospheric radical oxidation | Michael X. Yang, Alexandr Cosceev | 2022-12-06 |
| 11255606 | Gas flow control for millisecond anneal system | Joseph Cibere | 2022-02-22 |