Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11462413 | Processing of workpieces using deposition process and etch process | Shanyu Wang, Chun Yan, Hua Chung, Michael X. Yang, Qi Zhang | 2022-10-04 |
| 11387115 | Silicon mandrel etch after native oxide punch-through | Chun Yan, Sio On Lo, Hua Chung, Michael X. Yang | 2022-07-12 |
| 11338069 | Fluorescent and/or NIR coatings for medical objects, object recovery systems and methods | Jian Yang, James Wang, Christopher Barback, Erin Ward, Natalie Mendez +3 more | 2022-05-24 |
| 11276560 | Spacer etching process | Chun Yan, Michael X. Yang | 2022-03-15 |