Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11515144 | In-situ film annealing with spatial atomic layer deposition | Keiichi Tanaka, Mandyam Sriram, Srinivas Gandikota | 2022-11-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11515144 | In-situ film annealing with spatial atomic layer deposition | Keiichi Tanaka, Mandyam Sriram, Srinivas Gandikota | 2022-11-29 |