Issued Patents 2022
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11520233 | Substrate processing apparatus, substrate processing method, and storage medium | — | 2022-12-06 |
| 11515144 | In-situ film annealing with spatial atomic layer deposition | Andrew Short, Mandyam Sriram, Srinivas Gandikota | 2022-11-29 |
| 11488097 | Pickup request system and pickup request method | Kumi Harada, Makoto HIROKI, Keiji Sakaguchi, Norikazu Tagaki | 2022-11-01 |
| 11443743 | Voice control information output system, voice control information output method, and recording medium | Kiyonori Kido | 2022-09-13 |
| 11410834 | Substrate processing method | Tatsuo Matsudo | 2022-08-09 |
| 11402758 | Substrate processing apparatus, substrate processing method, and storage medium | — | 2022-08-02 |