Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11443920 | Plasma processing apparatus | Jun Yamawaku, Chishio Koshimizu | 2022-09-13 |
| 11410834 | Substrate processing method | Keiichi Tanaka | 2022-08-09 |
| 11328904 | Substrate processing apparatus | Shigeki Doba, Hiroyuki Ogawa, Hajime Naito, Akitaka Shimizu | 2022-05-10 |
| 11315765 | Plasma processing apparatus and plasma processing method | Jun Yamawaku, Chishio Koshimizu | 2022-04-26 |