Issued Patents 2022
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11532456 | Inspection method, inspection apparatus, and plasma processing apparatus | — | 2022-12-20 |
| 11476089 | Control method and plasma processing apparatus | Taichi Hirano, Toru HAYASAKA, Shinji Kubota, Koji Maruyama, Takashi Dokan | 2022-10-18 |
| 11446714 | Processing apparatus and processing method, and gas cluster generating apparatus and gas cluster generating method | Kazuya Dobashi | 2022-09-20 |
| 11443920 | Plasma processing apparatus | Jun Yamawaku, Tatsuo Matsudo | 2022-09-13 |
| 11443924 | Upper electrode and plasma processing apparatus | Gen TAMAMUSHI, Kazuya Nagaseki | 2022-09-13 |
| 11417502 | Plasma processing system and substrate processing method | — | 2022-08-16 |
| 11361947 | Apparatus for plasma processing and method of etching | — | 2022-06-14 |
| 11337297 | Plasma processing method and plasma processing apparatus | Takashi Dokan, Shinji Kubota | 2022-05-17 |
| 11315765 | Plasma processing apparatus and plasma processing method | Jun Yamawaku, Tatsuo Matsudo | 2022-04-26 |