Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11443924 | Upper electrode and plasma processing apparatus | Kazuya Nagaseki, Chishio Koshimizu | 2022-09-13 |
| 11315793 | Etching method and plasma processing apparatus | Kazuya Nagaseki | 2022-04-26 |
| 11227773 | Method for controlling electrostatic chuck and plasma processing apparatus | — | 2022-01-18 |