Issued Patents 2022
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11450515 | Plasma processing apparatus | Shinji Himori, Mitsunori Ohata | 2022-09-20 |
| 11443924 | Upper electrode and plasma processing apparatus | Gen TAMAMUSHI, Chishio Koshimizu | 2022-09-13 |
| 11393662 | Apparatuses and methods for plasma processing | Zhiying Chen, Joel Blakeney, Megan Carruth, Peter Ventzek, Alok Ranjan | 2022-07-19 |
| 11387077 | Plasma processing method and plasma processing apparatus | Shinji Kubota, Shinji Himori, Koichi Nagami | 2022-07-12 |
| 11315793 | Etching method and plasma processing apparatus | Gen TAMAMUSHI | 2022-04-26 |
| 11315770 | Exhaust device for processing apparatus provided with multiple blades | Kazuki Moyama, Toshiya Matsuda, Naokazu Furuya, Tatsuro Ohshita | 2022-04-26 |
| 11227786 | Method of manufacturing electrostatic chuck and electrostsatic chuck | Satoshi Taga, Yoshiyuki Kobayashi | 2022-01-18 |