Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11450515 | Plasma processing apparatus | Kazuya Nagaseki, Mitsunori Ohata | 2022-09-20 |
| 11387077 | Plasma processing method and plasma processing apparatus | Shinji Kubota, Kazuya Nagaseki, Koichi Nagami | 2022-07-12 |