Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11387077 | Plasma processing method and plasma processing apparatus | Shinji Kubota, Kazuya Nagaseki, Shinji Himori | 2022-07-12 |
| 11251048 | Plasma processing method and plasma processing apparatus | Yusuke Aoki, Toshikatsu TOBANA, Fumiya TAKATA, Shinya Morikita, Kazunobu Fujiwara +1 more | 2022-02-15 |