Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11251048 | Plasma processing method and plasma processing apparatus | Yusuke Aoki, Toshikatsu TOBANA, Fumiya TAKATA, Kazunobu Fujiwara, Jun Abe +1 more | 2022-02-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11251048 | Plasma processing method and plasma processing apparatus | Yusuke Aoki, Toshikatsu TOBANA, Fumiya TAKATA, Kazunobu Fujiwara, Jun Abe +1 more | 2022-02-15 |