Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11521834 | Plasma processing systems and methods for chemical processing a substrate | Peter Ventzek, Alok Ranjan | 2022-12-06 |
| 11450515 | Plasma processing apparatus | Kazuya Nagaseki, Shinji Himori | 2022-09-20 |
| 11251021 | Mode-switching plasma systems and methods of operating thereof | Peter Ventzek, Alok Ranjan, Michael Hummel | 2022-02-15 |