Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11430643 | Quantification of processing chamber species by electron energy sweep | Jianping Zhao, Peter Ventzek, Charles Schlechte | 2022-08-30 |
| 11251021 | Mode-switching plasma systems and methods of operating thereof | Peter Ventzek, Alok Ranjan, Mitsunori Ohata | 2022-02-15 |