Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11469525 | Antenna system, feeding network reconfiguration method, and apparatus | Guanxi Zhang, Long Shen, Yongyong Wang, Zhongming Qin | 2022-10-11 |
| 11430643 | Quantification of processing chamber species by electron energy sweep | Peter Ventzek, Charles Schlechte, Michael Hummel | 2022-08-30 |
| 11348761 | Impedance matching apparatus and control method | John Carroll, Peter Ventzek, Barton Lane | 2022-05-31 |
| 11322816 | Feeding device | Qingming Xie, Gaonan Zhou, Qiuyan Liang | 2022-05-03 |
| 11295937 | Broadband plasma processing systems and methods | Peter Ventzek | 2022-04-05 |