Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11515122 | System and methods for VHF plasma processing | — | 2022-11-29 |
| 11410832 | RF measurement system and method | Merritt Funk, Yohei Yamazawa, Chelsea DuBose | 2022-08-09 |
| 11393663 | Methods and systems for focus ring thickness determinations and feedback control | Merritt Funk, Alok Ranjan, Peter Ventzek, Justin Moses, Chelsea DuBose | 2022-07-19 |
| 11348761 | Impedance matching apparatus and control method | John Carroll, Jianping Zhao, Peter Ventzek | 2022-05-31 |