Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11393663 | Methods and systems for focus ring thickness determinations and feedback control | Merritt Funk, Alok Ranjan, Barton Lane, Peter Ventzek, Chelsea DuBose | 2022-07-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11393663 | Methods and systems for focus ring thickness determinations and feedback control | Merritt Funk, Alok Ranjan, Barton Lane, Peter Ventzek, Chelsea DuBose | 2022-07-19 |